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TY - CONF AU - González Díaz-Palacio, I. AU - Blick, R.H. AU - Hillert, W. AU - Wenskat, M. AU - Zierold, R. ED - Liu, Lin ED - Byrd, John M. ED - Neuenschwander, Regis T. ED - Picoreti, Renan ED - Schaa, Volker R. W. TI - ALD-Based NbTiN Studies for SIS R&D J2 - Proc. of IPAC2021, Campinas, SP, Brazil, 24-28 May 2021 CY - Campinas, SP, Brazil T2 - International Particle Accelerator Conference T3 - 12 LA - english AB - Superconductor-Insulator-Superconductor multilayers improve the performance of SRF cavities providing magnetic screening of the bulk cavity and lower surface resistance. In this framework NbTiN mixtures stand as a potential material of interest. Atomic layer deposition (ALD) allows for uniform coating of complex geometries and enables tuning of the stoichiometry and precise thickness control in sub-nm range. In this talk, we report about NbTiN thin films deposited by plasma-enhanced ALD on insulating AlN buffer layer. The deposition process has been optimized by studying the superconducting electrical properties of the films. Post-deposition thermal annealing studies with varying temperatures, annealing times, and gas atmospheres have been performed to further improve the thin film quality and the superconducting properties. Our experimental studies show an increase in Tc by 87.5% after thermal annealing and a maximum Tc of 13.9 K has been achieved for NbTiN of 23 nm thickness. Future steps include lattice characterization, using XRR/XRD/EBSD/PALS, and SRF measurements to obtain Hc1 and the superconducting gap. PB - JACoW Publishing CP - Geneva, Switzerland SP - 4420 EP - 4421 KW - site KW - cavity KW - plasma KW - SRF KW - niobium DA - 2021/08 PY - 2021 SN - 2673-5490 SN - 978-3-95450-214-1 DO - doi:10.18429/JACoW-IPAC2021-THPAB320 UR - https://jacow.org/ipac2021/papers/thpab320.pdf ER -