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@inproceedings{antipov:ipac2021-mopab153, author = {S.P. Antipov and S.V. Kuzikov and A.A. Vikharev}, title = {{Laser Microfabrication for Accelerator Applications}}, booktitle = {Proc. IPAC'21}, pages = {535--536}, eid = {MOPAB153}, language = {english}, keywords = {laser, FEM, simulation, emittance, cathode}, venue = {Campinas, SP, Brazil}, series = {International Particle Accelerator Conference}, number = {12}, publisher = {JACoW Publishing, Geneva, Switzerland}, month = {08}, year = {2021}, issn = {2673-5490}, isbn = {978-3-95450-214-1}, doi = {10.18429/JACoW-IPAC2021-MOPAB153}, url = {https://jacow.org/ipac2021/papers/mopab153.pdf}, note = {https://doi.org/10.18429/JACoW-IPAC2021-MOPAB153}, abstract = {{Laser microfabrication allows high precision ablation of materials at sub-mm scale. When laser pulse length is shorter than about 10 picoseconds the heat affected zone is minimized and ablation occurs without melting. Work-pieces processed in this fashion exhibit less structural damage and are expected to have a higher damage thresholds. In this paper we will review several case studies of laser-microfabricated components for accelerator and x-ray applications. Ablated materials include diamond, quartz, tungsten, copper, YAG:Ce and silicon.}}, }