The Joint Accelerator Conferences Website (JACoW) is an international collaboration that publishes the proceedings of accelerator conferences held around the world.
TY - CONF AU - Shu, D. AU - Anton, J.W.J. AU - Kearney, S.P. AU - Lai, B. AU - Liu, W. AU - Maser, J. AU - Roehrig, C. AU - Tischler, J.Z. ED - Schaa, Volker RW ED - Arduini, Gianluigi ED - Pranke, Juliana ED - Seidel, Mike ED - Lindroos, Mats TI - Mechanical Design of Compact Vertical and Horizontal Linear Nanopositioning Flexure Stages With Centimeter-Level Travel Range for X-Ray Beamline Instrumentation J2 - Proc. of IPAC2017, Copenhagen, Denmark, 14â19 May, 2017 C1 - Copenhagen, Denmark T2 - International Particle Accelerator Conference T3 - 8 LA - english AB - Nanopositioning techniques present an important capability to support the state-of-the-art x-ray instrumentation research for the APS operations and upgrade project. To overcome the performance limitations of precision ball-bearing-based or roller-bearing-based linear stage systems, compact vertical and horizontal linear nanopositioning flexure stages have been designed and developed at the APS with centimeter-level travel range and nanometer-level resolution for x-ray beamline instrumentation. Using improved deformation compensated linear guiding mechanisms [*,**], the APS T8-55 vertical linear flexure stage and T8-56 horizontal linear flexure stage are initially designed as a pair of sample scanning stages for a hard x-ray scanning microscope at the APS sector 2. Due to their unique repeatable nanopositioning performance over the centimeter-level travel range, these stages are also suitable for many photon beam lines optics with repeatable and stable nanopositioning requirements. The mechanical design and finite element analyses of the APS T8-55 and T8-56 flexural stages, as well as its initial mechanical test results with laser interferometer are described in this paper. PB - JACoW CP - Geneva, Switzerland SP - 4096 EP - 4099 KW - controls KW - laser KW - photon KW - instrumentation KW - synchrotron DA - 2017/05 PY - 2017 SN - 978-3-95450-182-3 DO - 10.18429/JACoW-IPAC2017-THPAB154 UR - http://jacow.org/ipac2017/papers/thpab154.pdf ER -