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Nowadays, a cyclotron CYCHU-10 used for PET is under construction in Huazhong University of Science and Technology (HUST) due to the growing demands in medical applications. For space-saving and low energy consumption, the CYCHU-10 was designed compactly and accurately, especially for the RF cavity consists of the valley of the magnetic pole and the dee electrodes installed on the vacuum chamber. The RF system will supply a 10kw power and large part of it will transform into thermal energy. This paper will introduce the thermal deformation of the RF cavity and the main vacuum chamber. Meanwhile the finite elements analysis thermal deformation with ANSYS Products will be present. Finally, the cooling system for the RF cavity will be carefully designed due to the result of thermo analysis and the mechanical tolerance demand in the RF system. Keywords- thermal deformation; mechanical tolerance; FEA;RF power.
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