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TY - UNPB AU - Hong, J.G. AU - Kim, S.J. AU - Ok, J.W. AU - Park, J.Y. ED - Kim, Changbum ED - Schaa, Volker R. W. ED - Kim, Dong-Eon ED - Lee, Jaeyu TI - Development of the Ion Beam Diagnostic System for BIBA using 28 GHz ECRIS at KBSI J2 - Proc. of IBIC2021, Pohang, Rep. of Korea, 24-28 May 2021 CY - Pohang, Rep. of Korea T2 - International Beam Instrumentation Conference T3 - 10 LA - english AB - Busan Ion Beam Accelerator (BIBA) is a compact linear accelerator facility using the 28 GHz Electron Cyclotron Resonance Ion Source (ECRIS) at Korea Basic Science Institute (KBSI). For utilization of ion beam, an ion implantation system has been developed to use a multi-charged state ion beams produced by 28 GHz ECRIS. Recently, the low energy beam transport (LEBT) system for BIBA has been re-designed taking into account the fringe effect of magnet to match the ion beam for ion implantation as well as for input beam for the accelerator such as Radio-Frequency Quadrupole (RFQ). The beam diagnostic system for monitoring such as current, position, profile, emittance and beam loss are also required for operating and improving accelerator system. In this paper, we report the result and design of ion beam diagnostics system to measure various beam parameters of the beam current, profile, and emittance. PB - JACoW Publishing CP - Geneva, Switzerland ER -