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The Joint Accelerator Conferences Website (JACoW) is an international collaboration that publishes the proceedings of accelerator conferences held around the world.


Text/Word citation export for TUIBCC002: EUV ERLs for Semiconductor Integrated Circuit Lithography

N. Nakamura, “EUV ERLs for Semiconductor Integrated Circuit Lithography”, presented at the 59th ICFA Advanced Beam Dynamics Workshop on Energy Recovery Linacs (ERL'17), Geneva, Switzerland, Jun 2017, paper TUIBCC002, unpublished.