The beamline of Isotope Separation On-Line (ISOL) system at RAON was constructed. Currently, the beamline is commissioning using 133Cs and 120Sn ion beam. The produced ion from Target Ion Source(TIS) is delivered to Electron Beam Ion Source (EBIS) charge breeder through the Radio Frequency Quadrupole Cooler Buncher (RFQ CB). The RFQ CB handles and delivers the beams required by EBIS. A sufficiently cooled and bunched beam improves the charge breeding efficiency of EBIS. The RFQ CB cools and bunches DC beam from the TIS, delivering 1E+8 ions per bunch to the EBIS. In order to increase the efficiency, the beam optics were optimized in consideration of the space charge effect. As a result, 1e+8 ions could be sent in a bunch with a length of several ten microseconds. In this presentation, the beam commissioning results for RFQ CB and EBIS will be discussed.