| Paper | Title | Page |
|---|---|---|
| MOPC146 | Development of Piezoelectric Pulse Gas Valve for Small ECR Ion Source | 418 |
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| In a conventional ion source, the source gas is continuously fed even in its pulse operation. This requires a high load to a vacuum pumping system. The situation is prominent when the gas load is relatively higher in such a high current ion source. In order to improve this situation, we try to supply gas only when it is needed by synchronizing the gas feed with the extraction of the ion beam. We have developed a small pulse-gas-valve using a commercially available disc-shape piezoelectric element. This valve is small enough to be mounted in our ECR ion source and is capable of very fast open-and-close operation of an order of kHz repetition. A small ECR ion source with this valve will be presented. |