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The first 1.3GHz low-loss large grain 9-cell superconducting cavity for ILC was fabricated at the Institute of High Energy Physics (IHEP) in April, 2010. The gradient of the cavity reached 20MV/m on the first vertical test in KEK in June, 2010. The gradient was limited by quench and field emission of the ninth-cell of the cavity. To locate the position of defects and improve surface processing, we have developed a high resolution inspection camera for the 1.3GHz 9-cell superconducting cavity of IHEP to check the cavity surface and make comparison. The camera is suitable for single and multi-cell 1.3GHz superconducting cavities. As there are several types of cavity under developing in IHEP, the camera was designed to be suitable for different type and frequency cavities like 500MHz BEPC II superconducting cavity, 1.3GHz TESLA and TESLA-like cavity, 1.3GHz and 650MHz low-beta cavity.
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