• H.S. Wang, T.C. Tseng, D.-J. Wang, P.S. Yaw
  NSRRC, Hsinchu

A low run-out rotating sample stage is under development to realize a precise resolution within 30 nm on the horizontal plane for the end-station of transmission X-ray microscope (TXM) at NSRRC. The main assembly consists of a commercial rotation stage with run-out less than 1 μm, six capacitive sensors, one master ball, one flat and a horizontal adjusting stage. Error sources (including the profile of the master ball, run-out of the master ball in horizontal and vertical directions, flat plate) are separated from stage and the sensor readings can be down to the nanometer level. A feedback method is proposed to compensate the systematic errors and keeps the samples with little run-out and axial motion in the level of several tens nanometer. The details and tests of the rotation stage are presented in this paper.

• W.Y. Lai, J.-R. Chen, T.C. Tseng, H.S. Wang
  NSRRC, Hsinchu

TPS (Taiwan Photon Source) is a new 3GeV ring to be constructed at NSRRC Taiwan. A motorized magnet girder system with 6 cam movers on 3 pedestals had been designed and tested to provide 6-axis precise adjustments. With 3 consecutive girders to form one section, there will be 72 girders in the whole ring. In order to align the girders precisely and quickly with less manpower, considering the deformation of the floor and limited space in the tunnel also frequent earthquakes in Taiwan, a whole-ring girders auto alignment system was thus proposed. This system consists of touched sensors between consecutive girders and laser PSD system between straight section girders in addition with electric leveling sensors on each girder. The system operating algorithm had been defined and program also fulfilled to be tested on a 3 girders prototype system. The detailed system design and testing results would be described in this paper.