Proton Beam Applications for Silicon Bulk Micromachining

Nenzi, Paolo; Ambrosini, Fabrizio; Balucani, Marco; Bazzano, Giulia; Klyshko, Alexy; Marracino, Francesca; Picardi, Luigi; Ronsivalle, Concetta; Snels, Claudia; Surrenti, Vincenzo; Tucci, Mario; Vadrucci, Monia

doi:10.18429/JACoW-IPAC2015-TUPWI003

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BiBTeX citation export for TUPWI003: Proton Beam Applications for Silicon Bulk Micromachining

@InProceedings{Nenzi:IPAC2015-TUPWI003,
  author       = {P. Nenzi and others},
  title        = {{P}roton {B}eam {A}pplications for {S}ilicon {B}ulk {M}icromachining},
  booktitle    = {Proc. 6th International Particle Accelerator Conference (IPAC'15),
                  Richmond, VA, USA, May 3-8, 2015},
  pages        = {2241--2244},
  paper        = {TUPWI003},
  language     = {english},
  keywords     = {proton, ion, experiment, linac, quadrupole},
  venue        = {Richmond, VA, USA},
  series       = {International Particle Accelerator Conference},
  number       = {6},
  publisher    = {JACoW},
  address      = {Geneva, Switzerland},
  month        = {June},
  year         = {2015},
  isbn         = {978-3-95450-168-7},
  doi          = {https://doi.org/10.18429/JACoW-IPAC2015-TUPWI003},
  url          = {http://jacow.org/ipac2015/papers/tupwi003.pdf},
  note         = {https://doi.org/10.18429/JACoW-IPAC2015-TUPWI003},
}