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BiBTeX citation export for MOYGB1: Industrial Applications of Free Electron Lasers: Extreme Ultraviolet Lithography

@unpublished{Naulleau:IPAC2015-MOYGB1,
  author       = {P. Naulleau},
  title        = {{I}ndustrial {A}pplications of {F}ree {E}lectron {L}asers: {E}xtreme {U}ltraviolet {L}ithography},
  booktitle    = {Proc. of International Particle Accelerator Conference (IPAC'15),
                  Richmond, VA, USA, May 3-8, 2015},
  language     = {english},
  intype       = {presented at the},
  series       = {International Particle Accelerator Conference},
  number       = {6},
  venue        = {Richmond, VA, USA},
  publisher    = {JACoW},
  address      = {Geneva, Switzerland},
  month        = {June},
  year         = {2015},
  note         = {presented at IPAC2015 in Richmond, VA, USA, unpublished},
}