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BiBTeX citation export for WEPME036: Simulation of the Trajectory of Electrons in a Magnetron Sputtering System of TiN with CST Particle Studio

@InProceedings{Wang:IPAC2014-WEPME036,
  author       = {J. Wang and others},
  title        = {{S}imulation of the {T}rajectory of {E}lectrons in a {M}agnetron {S}puttering {S}ystem of {T}i{N} with {CST} {P}article {S}tudio},
  booktitle    = {Proc. 5th International Particle Accelerator Conference (IPAC'14),
                  Dresden, Germany, June 15-20, 2014},
  pages        = {2341--2343},
  paper        = {WEPME036},
  language     = {english},
  keywords     = {vacuum, cathode, electron, simulation, experiment},
  venue        = {Dresden, Germany},
  series       = {International Particle Accelerator Conference},
  number       = {5},
  publisher    = {JACoW},
  address      = {Geneva, Switzerland},
  month        = {July},
  year         = {2014},
  isbn         = {978-3-95450-132-8},
  doi          = {https://doi.org/10.18429/JACoW-IPAC2014-WEPME036},
  url          = {http://jacow.org/ipac2014/papers/wepme036.pdf},
  note         = {https://doi.org/10.18429/JACoW-IPAC2014-WEPME036},
}