IPAC2013 - List of Authors (Yang, C.K.)

Paper	Title	Page
THPFI075	Baking Test for an In-vacuum Undulator	3469
	L.H. Wu, C.K. Chan, J.-R. Chen, G.-Y. Hsiung, S-N. Hsu, H.P. Hsueh, J.C. Huang, C.K. Yang NSRRC, Hsinchu, Taiwan J.-R. Chen National Tsing Hua University, Hsinchu, Taiwan
	For Taiwan Photon Source in NSRRC, the in-vacuum undulator (IU22) will be set in the straight section. The baking test took place in the NSRRC. The heating wires were welded on the outside wall of stainless chamber. The tape heaters were used for the sites without the heating wires. After acceptation test, we assemble the residual gas analysis (RGA) and extractor gauge in the IU22. The pumping down curve and RGA spectrum were recorded and investigated. It was found the slope of the pumping curve near 1 h is -0.99. When the temperature gradually increases to about 185 oC, the vacuum pressure arrives to about 8.7x10^-5 Torr. The most gas source is from water before baking process. After baking test, the major residual gas includes H2, CH4, H2O, CO, and CO2. We analyze the RGA spectrum during the baking process and discuss in the paper.

Paper

Title

Page

Baking Test for an In-vacuum Undulator

3469

L.H. Wu, C.K. Chan, J.-R. Chen, G.-Y. Hsiung, S-N. Hsu, H.P. Hsueh, J.C. Huang, C.K. Yang
NSRRC, Hsinchu, Taiwan
J.-R. Chen
National Tsing Hua University, Hsinchu, Taiwan

For Taiwan Photon Source in NSRRC, the in-vacuum undulator (IU22) will be set in the straight section. The baking test took place in the NSRRC. The heating wires were welded on the outside wall of stainless chamber. The tape heaters were used for the sites without the heating wires. After acceptation test, we assemble the residual gas analysis (RGA) and extractor gauge in the IU22. The pumping down curve and RGA spectrum were recorded and investigated. It was found the slope of the pumping curve near 1 h is -0.99. When the temperature gradually increases to about 185 oC, the vacuum pressure arrives to about 8.7x10^-5 Torr. The most gas source is from water before baking process. After baking test, the major residual gas includes H2, CH4, H2O, CO, and CO2. We analyze the RGA spectrum during the baking process and discuss in the paper.