Author: Sato, R.
Paper Title Page
THPWA013 Direct Diagnostic Technique of High-intensity Laser Profile based on Laser-Compton Scattering 3657
  • Y. Yoshida, A. Endo, K. Sakaue, R. Sato, M. Washio
    Waseda University, Tokyo, Japan
  Funding: Work supported by NEDO (New Energy and Industrial Technology Development Organization).
A high-intensity laser is essential for the LPP (Laser Produced Plasma) EUV generation, which is studied as the next generation light source of ultra-fine semiconductor lithography. Nevertheless, there is no way to directly measure the profile of high-intensity laser. Therefore, we have been developing a method for measuring high-intensity laser profile based on the laser-Compton scattering using a Cs-Te photo cathode RF-Gun at Waseda University. In this diagnostic technique, laser profile is obtained by scanning the extremely-focused electron beam, which is about 10μm by solenoid lens. We have obtained the 10μm beam size by solenoid lens using tracking code GPT (General Particle Tracer) by optimizing the beam parameter and lens shape. Recently, we have installed solenoid lens and generated focused beam. The focused beam size was evaluated by using radiochromic film called GAFCHROMIC dosimetry film type HD-810. In this conference, we will report the results of GPT simulations, beam size measurements and future prospects.