Author: Cuckov, F.     [Čučkov, F.]
Paper Title Page
WEPPC104 Tomography as a Diagnostic Tool for Plasma Etching of SRF Cavities 2459
  • M. Nikolić, A.L. Godunov, S. Popović, A. Samolov, L. Vušković
    ODU, Norfolk, Virginia, USA
  • F. Čučkov
    Old Dominion University, Norfolk, USA
  Plasma based surface modification is a promising alternative for etching of superconductive radio frequency (SRF) cavities. A plasma processed SRF cavity presents a plasma reactor with limited or distorted symmetry. We are developing a tomographic reconstruction of local plasma parameters, as a diagnostic tool in the plasma etching setting of SRF cavities. The method is non-invasive and provides deep insight into the fundamental processes and phenomena during the plasma treatment of SRF cavities’ surfaces. Here we report on our progress in developing tomographic numerical method, based on 2D inverse Radon formula. We tested it on supersonic flowing microwave discharge maintained in the cylindrical quartz tube. Due to the model’s sensitivity to the noise signal in the experiment, an automated measurement system has been built with the aim to increase the overall precision of data acquisition as well as to stream line the measurement process.