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MOOAMH04 |
Axial Symmetric Open Magnetic Traps with Depressed Transversal Losses of Plasmas |
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- V. Sidorov, S. Golubev, I. Izotov, S. Razin, V. Skalyga, A. Vodopyanov
IAP/RAS, Nizhny Novgorod, Russia
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Development trend of the modern ECR ion sources is connected with the continued increase of the heating radiation frequency and, as a consequence, increase of the magnetic field value. In this case the construction of the MHD stable non-axial symmetric magnetic systems becomes rather complicated. Thus, the search of axial symmetric magnetic systems with depressed transversal losses caused by MHD instabilities is in a great demand. In this report some of the possible versions of such magnetic systems are presented: cusp magnetic trap, system with magnetic divertor and the mirror trap with the differential rotation layer in plasmas. Perspectives of using these systems in the ECR ion sources according to the results of experimental investigations on SMIS 37 setup in Nizhny Novgorod are discussed.
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Slides MOOAMH04 [1.257 MB]
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| THOMMH03 |
A Point-like Source of Extreme Ultraviolet Radiation Based on Non-equilibrium Discharge, Sustained by Powerful Radiation of Terahertz Gyrotron |
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- V. Sidorov, M.Yu. Glyavin, S. Golubev, I. Izotov, A.G. Litvak, G. Luchinin, D. Mansfeld, S. Razin, V. Skalyga, A. Vodopyanov
IAP/RAS, Nizhny Novgorod, Russia
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Funding: The work was supported by RSF within grant No 14-12-00609.
It is proposed in this paper to use discharge plasma supported by terahertz radiation as a source of EUV light for high-resolution lithography. In this report we discuss the experimental investigation of two types of EUV sources based on discharge, supported by powerful gyrotron radiation. Following investigation results are described: -a series of experiments that demonstrate the generation of EUV light from the vacuum-arc discharge plasma in tin vapor in the magnetic trap heated by gyrotron radiation with a frequency of 75 GHz under electron cyclotron resonance (ECR) conditions; -a numerical modeling of the plasma emissivity in the EUV range, depending on the parameters of the heating radiation is performed; -experimental studies of EUV emission from plasma discharge sustained by strong terahertz powerful radiation in inhomogeneous gas flows are started.
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Slides THOMMH03 [1.249 MB]
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