Author: Ren, H.T.
Paper Title Page
MOOBMH04 Emission Spectroscopy Diagnostic of Plasma Inside 2.45 GHz ECR Ion Source at PKU 20
 
  • Y. Xu, J. Chen, J.E. Chen, Z.Y. Guo, S.X. Peng, H.T. Ren, J.F. Zhang, T. Zhang, J. Zhao
    PKU, Beijing, People's Republic of China
  • A.L. Zhang
    Graduate University, Chinese Academy of Sciences, Beijing, People's Republic of China
 
  Funding: This work is supported by the National Science Foundation of China (Grant Nos. 11175009 and 91126004).
The 2.45 GHz permanent magnet electron cyclotron resonance ion source (PMECR) at Peking University (PKU) can produce 100 mA H+, 40 mA H2+ and 20 mA H3+ under different conditions, but the physics processes and plasma characteristics within the discharge chamber are not very clear until now. Langmuir probe, laser detachment, absorption spectroscopy and optical emission spectroscopy are common approaches for diagnosing the plasma. Among those methods, optical emission spectroscopy is a simple in situ one without disturbing the plasma. To better understand the plasma producing processes, a new ion source with transparent quartz discharge chamber was designed at PKU so that plasma diagnostic can be performed through directly detecting the light generated within ECR zone by fiber optics. Collisional radiative (CR) model is utilized to calculate plasma parameters like electron density ne and electron temperature Te for non-equilibrium plasma in ECR ion source. The spectroscopy diagnosis platform has been constructed, and preliminary results will be presented in this paper.
*Author to whom correspondence should be addressed. Electronic mail:
sxpeng@pku.edu.cn.
 
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