ECRIS-2014 - List of Authors (Luchinin, G.)

Paper

Title

Page

A Point-like Source of Extreme Ultraviolet Radiation Based on Non-equilibrium Discharge, Sustained by Powerful Radiation of Terahertz Gyrotron

140

V. Sidorov, M.Yu. Glyavin, S. Golubev, I. Izotov, A.G. Litvak, G. Luchinin, D. Mansfeld, S. Razin, V. Skalyga, A. Vodopyanov
IAP/RAS, Nizhny Novgorod, Russia

Funding: The work was supported by RSF within grant No 14-12-00609.
It is proposed in this paper to use discharge plasma supported by terahertz radiation as a source of EUV light for high-resolution lithography. In this report we discuss the experimental investigation of two types of EUV sources based on discharge, supported by powerful gyrotron radiation. Following investigation results are described: -a series of experiments that demonstrate the generation of EUV light from the vacuum-arc discharge plasma in tin vapor in the magnetic trap heated by gyrotron radiation with a frequency of 75 GHz under electron cyclotron resonance (ECR) conditions; -a numerical modeling of the plasma emissivity in the EUV range, depending on the parameters of the heating radiation is performed; -experimental studies of EUV emission from plasma discharge sustained by strong terahertz powerful radiation in inhomogeneous gas flows are started.

Slides THOMMH03 [1.249 MB]

Paper	Title	Page
THOMMH03	A Point-like Source of Extreme Ultraviolet Radiation Based on Non-equilibrium Discharge, Sustained by Powerful Radiation of Terahertz Gyrotron	140
	V. Sidorov, M.Yu. Glyavin, S. Golubev, I. Izotov, A.G. Litvak, G. Luchinin, D. Mansfeld, S. Razin, V. Skalyga, A. Vodopyanov IAP/RAS, Nizhny Novgorod, Russia
	Funding: The work was supported by RSF within grant No 14-12-00609. It is proposed in this paper to use discharge plasma supported by terahertz radiation as a source of EUV light for high-resolution lithography. In this report we discuss the experimental investigation of two types of EUV sources based on discharge, supported by powerful gyrotron radiation. Following investigation results are described: -a series of experiments that demonstrate the generation of EUV light from the vacuum-arc discharge plasma in tin vapor in the magnetic trap heated by gyrotron radiation with a frequency of 75 GHz under electron cyclotron resonance (ECR) conditions; -a numerical modeling of the plasma emissivity in the EUV range, depending on the parameters of the heating radiation is performed; -experimental studies of EUV emission from plasma discharge sustained by strong terahertz powerful radiation in inhomogeneous gas flows are started.
	Slides THOMMH03 [1.249 MB]