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In this paper, we will present our recent results on the research of the ultrafast high power RF switches based on silicon. We have developed a switch module at X-band which can use a silicon window as the switch, and scaled it to 30GHz for the CLIC application. The switching is realized by generation of carriers in the bulk silicon. The carriers can be generated electrically or/and optically. The electrically controlled switches use PIN diodes to inject carrier. We have built the PIN diode switches at X-band, with <300ns switching time. The optically controlled switches use powerful laser to excite carriers. By combining the laser excitation and electrical carrier generation, significant reduction in the required power of both the laser and the electrical driver is expected. High power test is under going.
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