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TY - CONF AU - Schenkel, T. AU - Afridi, K. AU - Giesbrecht, G. AU - Ji, Q. AU - Lal, A. AU - Ni, D. AU - Persaud, A. AU - Seidl, P.A. AU - Sinha, S. ED - Yamazaki, Yoshishige ED - Raubenheimer, Tor ED - McCausey, Amy ED - Schaa, Volker RW TI - MEMS Based Multibeam Ion Linacs J2 - Proc. of NAPAC2019, Lansing, MI, USA, 01-06 September 2019 CY - Lansing, MI, USA T2 - North American Particle Accelerator Conference T3 - 4 LA - english AB - We report on the development of multi-beam RF linear ion accelerators that are formed from stacks o low cost wafers. Wafers are prepared using MEMS techniques. We have demonstrated acceleration of ions in a 3x3 beamlet array with ion currents in the 0.1 mA range and acceleration at the 10 keV in lattice of RF (13 MHz) acceleration units and electrostatic quadrupoles. We will describe the status and plans for scaling to 10x10 beams, ion currents >1 mA and ion energies >100 keV in a compact, low cost setup for applications in materials processing. PB - JACoW Publishing CP - Geneva, Switzerland SP - 249 EP - 251 KW - acceleration KW - laser KW - extraction KW - quadrupole KW - ion-source DA - 2019/10 PY - 2019 SN - 2673-7000 SN - 978-3-95450-223-3 DO - doi:10.18429/JACoW-NAPAC2019-MOPLO07 UR - http://jacow.org/napac2019/papers/moplo07.pdf ER -