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@InProceedings{schenkel:napac2019-moplo07,
author = {T. Schenkel and K. Afridi and G. Giesbrecht and Q. Ji and A. Lal and D. Ni and A. Persaud and P.A. Seidl and S. Sinha},
% author = {T. Schenkel and K. Afridi and G. Giesbrecht and Q. Ji and A. Lal and D. Ni and others},
% author = {T. Schenkel and others},
title = {{MEMS Based Multibeam Ion Linacs}},
booktitle = {Proc. NAPAC'19},
pages = {249--251},
paper = {MOPLO07},
language = {english},
keywords = {acceleration, laser, extraction, quadrupole, ion-source},
venue = {Lansing, MI, USA},
series = {North American Particle Accelerator Conference},
number = {4},
publisher = {JACoW Publishing, Geneva, Switzerland},
month = {10},
year = {2019},
issn = {2673-7000},
isbn = {978-3-95450-223-3},
doi = {10.18429/JACoW-NAPAC2019-MOPLO07},
url = {http://jacow.org/napac2019/papers/moplo07.pdf},
note = {https://doi.org/10.18429/JACoW-NAPAC2019-MOPLO07},
abstract = {We report on the development of multi-beam RF linear ion accelerators that are formed from stacks o low cost wafers. Wafers are prepared using MEMS techniques. We have demonstrated acceleration of ions in a 3x3 beamlet array with ion currents in the 0.1 mA range and acceleration at the 10 keV in lattice of RF (13 MHz) acceleration units and electrostatic quadrupoles. We will describe the status and plans for scaling to 10x10 beams, ion currents >1 mA and ion energies >100 keV in a compact, low cost setup for applications in materials processing.},
}