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@InProceedings{antipov:napac2019-moplh16, author = {S.P. Antipov and E. Dosov and E. Gomez and S.V. Kuzikov and A.A. Vikharev}, title = {{Femtosecond Laser Microfabrication for Advanced Accelerator Applications}}, booktitle = {Proc. NAPAC'19}, pages = {207--209}, paper = {MOPLH16}, language = {english}, keywords = {laser, controls, FEM, polarization, cathode}, venue = {Lansing, MI, USA}, series = {North American Particle Accelerator Conference}, number = {4}, publisher = {JACoW Publishing, Geneva, Switzerland}, month = {10}, year = {2019}, issn = {2673-7000}, isbn = {978-3-95450-223-3}, doi = {10.18429/JACoW-NAPAC2019-MOPLH16}, url = {http://jacow.org/napac2019/papers/moplh16.pdf}, note = {https://doi.org/10.18429/JACoW-NAPAC2019-MOPLH16}, abstract = {Femtosecond laser microfabrication allows for precise dimension control and reduced thermal stress of the machined materials. It can be applied to a wide range of materials from copper to diamond. Combined with secondary operations like polishing laser microfabrication can be utilized in various state of the art components required for AAC community. In this paper we will review several applications of laser microfabrication for Advanced Accelerator research and development. These will include wakefield structures (corrugated metal and dielectric loaded), plasma capillaries, x-ray refractive optics, high power laser optical components: mirrors, phase plates.}, }