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| MOPML011 |
Liquid Cluster Ion Beam Processing of Transition Metal Films |
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- D. Shimizu, H. Ryuto, M. Takeuchi, D. Yamamoto
Kyoto University, Photonics and Electronics Science and Engineering Center, Kyoto, Japan
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The irradiation effects of cluster ion beams are characterized by the high-density collision of molecules that comprise the clusters against a target. According to molecular dynamics calculations, the local temperature of the colliding cluster and the surface of the target are expected to increase to several thousand K. The enhancement of the chemical interactions between the molecules in the colliding clusters and the atoms on the target surface is expected, if polyatomic molecules, such as ethanol and acetone, are used for the source material of the cluster. So, the irradiation effects of the polyatomic liquid cluster ion beams on transition metal films have been studied to examine the possibility of utilizing the liquid cluster ion beam technique for the processing of transition metal films. The transition metal films were formed by magnetron sputtering. The liquid clusters were produced by the adiabatic expansion method and ionized by electron ionization. The sputtering yields of transition metal films induced by liquid cluster ions are discussed.
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| DOI • |
reference for this paper
※ https://doi.org/10.18429/JACoW-IPAC2018-MOPML011
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