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| THPAL058 |
Effect of Ozonated Water Cleaning on Photon Stimulated Desorption in a Stainless Steel Chamber |
3778 |
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- C.M. Cheng, C.K. Chan, C.-C. Chang, Y.T. Cheng, J. -Y. Chuang, G.-Y. Hsiung, L.H. Wu, Y.C. Yang
NSRRC, Hsinchu, Taiwan
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Aluminium vacuum chambers cleaned with ozonated water show a reduction of residual carbon and lower surface outgassing rate after baking. We would like to investigate if stainless steel chambers show similar ef-fects. A stainless steel test chamber was cleaned by stand-ard chemical cleaning only and then compared with an-other one after immersion in 30ppm ozonated water for thirty minutes. Both samples were baked, then photon exposed and the photon desorption yields were deter-mined by vacuum gauges and residual gas analysers at the TLS 19B beamline. The test results on photon stimulated desorption yields and partial pressure variations with and without ozonated water cleaning of the stainless steel tubes will be discussed in some detail.
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| DOI • |
reference for this paper
※ https://doi.org/10.18429/JACoW-IPAC2018-THPAL058
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