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TY - CONF AU - Engblom, C. AU - Abiven, Y.-M. AU - Alves, F. AU - Jobert, N. AU - Kubsky, S.K. AU - Langlois, F. AU - Lestrade, A. AU - Stankevic, T. ED - Schaa, Volker RW ED - Costa, Isidre ED - FernÃ¡ndez, David ED - Matilla, Ãscar TI - Nanoprobe Results: Metrology & Control in Stacked Closed-Loop Systems J2 - Proc. of ICALEPCS2017, Barcelona, Spain, 8-13 October 2017 C1 - Barcelona, Spain T2 - International Conference on Accelerator and Large Experimental Control Systems T3 - 16 LA - english AB - Over the course of four years, the Nanoprobe project worked to deliver prototypes capable of nm-precision and accuracy with long-range millimetric sample positioning in 3D- scanning tomography for long beamline endstations of Synchrotron Soleil and MAXIV. The ambition of the project necessitated a joint progress between several fields of expertise combining mechanics, metrology, motion control, and software programming. Interferometry in stage characterization has been a crucial point; not only to qualify motion errors but to actively integrate it into control systems with feedback and/or feedforward schemes in order to reduce XYZ position errors down to the nm- level. As such, a new way of characterizing rotation stages was developed and ultimately used in control schemes utilising the Delta Tau PowerPMAC platform. This paper details the obtained results as well as the methodology and approach of the project to achieve this. PB - JACoW CP - Geneva, Switzerland SP - 1028 EP - 1033 KW - ion KW - controls KW - feedback KW - TANGO KW - synchrotron DA - 2018/01 PY - 2018 SN - 978-3-95450-193-9 DO - 10.18429/JACoW-ICALEPCS2017-WEAPL04 UR - http://jacow.org/icalepcs2017/papers/weapl04.pdf ER -